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Vacuum Chamber Housings CNC Machining for Semiconductor Tools
Vacuum chamber housings are specialized machined enclosures used for holding and maintaining ultra-high vacuum for plasma processors, thin film deposition, and ion implantation in semiconductor manufacturing equipment. At Zintilon, we focus on high CNC machined vacuum chamber housings. employing complex multi-axis milling techniques to ensure exceptional sealing surfaces, port alignment, and milling chamber rigidity for leak tightness and uniformity in cleanroom fabrication process integrated fabricating facilities.
- Machining for complex chamber geometries and sealing surfaces
- Tight tolerances up to ±0.005 in
- Precision milling, sealing surface finishing & vacuum leak testing
- Support for rapid prototyping and full-scale production
- ISO 9001-certified semiconductor equipment manufacturing
Trusted by 15,000+ businesses
Why Semi-conductor Companies
Choose Zintilon
Increased Productivity
Engineers get time back by not dealing with immature supply chains or lack of supply chain staffing in their company and get parts fast.
10x Tighter Tolerances
Zintilon can machine parts with tolerances as tight as+/ - 0.0001 in -10x greater precision compared to other leading services.
World Class Quality
Zintilon provides aerospace parts for leading aerospace enterprises, verified to be compliant with ISO9001 quality standard by a certified registrar. Also, our network includes AS9100 certified manufacturing partners, as needed.
From Prototyping to Mass Production
Machining provided to mask components of chamber housings and vacuum integrated modules for semiconductor fabrication equipped plasma processors and wafer fabrication facilities for targeted supply chains and in specific global market areas.
Prototype Vacuum Chamber Housings
Replicate your design in engineering and obtain high precision prototypes of vacuum chamber housings for testing vacuum integrity and alignment of ports in the automated vacuum system and for the assessment of contamination control measures in the system to certify the design before initiating the full scale production.
Key Points:
Rapid prototyping with high precision
Tight tolerances (±0.005 in)
Test design, vacuum performance, and sealing early
Key Points:
Rapid prototyping with high precision
Tight tolerances (±0.005 in)
Test design, vacuum performance, and sealing early
EVT
Develop design models of vacuum chamber structures. Prioritize the identification of potential problems early to ensure avoidance of design conflicts during the scale-up process.
Key Points:
Validate prototype functionality
Rapid design iterations
Ensure readiness for production
Key Points:
Validate prototype functionality
Rapid design iterations
Ensure readiness for production
DVT
Dimensional accuracy, vacuum functionality, and housing performance are cross-validated on different materials and processes to confirms design fit, process integration, and environment control prior to production.
Key Points:
Confirm design integrity and sealing
Test multiple materials and configurations
Ensure production-ready performance
Key Points:
Confirm design integrity and sealing
Test multiple materials and configurations
Ensure production-ready performance
PVT
Assess the ability for large scale production of vacuum chambers and housing, and identify PB manufacturing gaps to realize first production and build sequencing for control.
Key Points:
Test large-scale production capability
Detect and fix process issues early
Ensure consistent part quality
Key Points:
Test large-scale production capability
Detect and fix process issues early
Ensure consistent part quality
Mass Production
Produce quality, vacuum-sealed chamber housings on a set schedule in compliance with the expectations of the semiconductor equipment manufacturers and process tool suppliers. Ensure precise and leak-tight operation.
Key Points:
Consistent, high-volume production
Precision machining for vacuum integrity
Fast turnaround with strict quality control
Key Points:
Consistent, high-volume production
Precision machining for vacuum integrity
Fast turnaround with strict quality control
Simplified Sourcing for
the Semi-conductor Industry
Our aviation industry parts manufacturing capabilities have been verified by many listed companies. We provide a variety of manufacturing processes and surface treatments for aerospace parts including titanium alloys and aluminum alloys.
Explore Other Semiconductor Components
Browse our complete selection of CNC machined semiconductor components, crafted for durability and ultra-tight tolerances. From precision tooling and fixture parts to vacuum chambers and wafer handling systems, we deliver solutions tailored to advanced semiconductor production.
Semiconductor Vacuum Chamber Housings Machining Capabilities
Using advanced multi-axis CNC machining centers, helium leak testing, and experienced semiconductor machinists, we provide Vacuum Chamber Housings CNC Machining for Semiconductor Tools. For process chambers, load locks, and transfer module histograms with sealing surfaces, component engineering is done for vacuum, plasma confinement, and contamination control.
We conduct multi-axis sealing surface machining, miling, port integration, electropolishing for optimum O-ring sealing and reduced outgassing, followed by leak helium testing and dimensional checks. We machine vacuum chamber housings from various alloys, including 6061-T, 5083, 304L stainless steel, 316L, anodized aluminum, and from other materials to ensure vacuum integrity and resistance corrosion during plasma exposure in semiconductor processing, and to adequately meet UHV requirements fine vacuum machining.
Aerospace
Materials & Finishes
Materials
We provide a wide range of materials, including metals, plastics, and composites.
Finishes
We offer superior surface finishes that enhance part durability and aesthetics for applications requiring smooth or textured surfaces.
Specialist Industries
you are welcome to emphasize it in the drawings or communicate with the sales.
Materials for Vacuum Chamber Housings
Our CNC machine shop supports rapid prototyping and precision module production using over 12 vacuum-compatible metals, other vacuum-compatible specialty alloys, and a variety of vacuum chamber housings machining for semiconductor tools with consistent quality and ultra-high vacuum performance in fine machining.
Due to the low mechanical strength of pure magnesium, magnesium alloys are mainly used. Magnesium alloy has low density but high strength and good rigidity. Good toughness and strong shock absorption. Low heat capacity, fast solidification speed, and good die-casting performance.
Price
$ $ $ $
Lead Time
< 7 days
Tolerances
Down to ±0.005 mm
Max part size
3000*2200*1100 mm
Min part size
2*2*2 mm
Steel is a strong, versatile, and durable alloy of iron and carbon. Steel is strong and durable. High tensile strength, corrosion resistance heat and fire resistance, easily molded and formed. Its applications range from construction materials and structural components to automotive and aerospace components.
Price
$ $ $ $ $
Lead Time
< 10 days
Tolerances
Down to ±0.001 mm (routing)
Max part size
3000*2200*1100 mm
Min part size
2*2*2 mm
Let’s Build Something Great, Together
FAQs: Vacuum Chamber Housings for Semiconductor Applications
Multi-axis CNC milling performs creation of chamber profiles along with mounting flanges, view ports, and service access doors as an integrated element of the chamber. Precision boring machines size and open large diameter ports and maintain concentricity within 0.005 inches for standardized vacuum flanges which conform to ISO, KF, and ConFlat standards. Face milling machines obtain the flatness and surface finish required on the O-ring sealing surfaces within 0.005 inches flatness and Ra surface finish of below 1.6 microns. Coordinate drilling achieves the accuracy required for the position of patterns for bolt holes within ±0.005 inches for mounting the flanges. Mounting threads are created by thread milling and electropolishing translates to stainless steel achieves Ra of below 0.4 microns by removing 10 to 50 microns of surface to reduce outgassing and particle adhesion. Distortion is reduced by stress-relief annealing.
The Aluminum 6061-T6, 5083, and 5086 characteristics include lightweight construction which reduces equipment floor loading and footprint, assisting in rapid temperature control which makes excellent thermal conductivity of 167 watts per meter-Kelvin and thermal conductivity, decreasing costs for larger processing chambers, easy machining for complex port integration and mounting features for vacuum chambers in construction, very low outgassing rates under 10⁻⁸ Torr-liters per second per square centimeter after required processing, and cost for large process chambers. Stainless Steel 304L and 316L provide maximum strength for balanced pressure atmospheric differential forces, and outstanding resistance to plasma fluorine and chlorine of the vacuum chamber materials, ultra-low outgassing under 10⁻⁹ Torr-liters per second electropolished vacuum chambers. which can be baked to 450~C for ultra-high vacuum processes. anodized aluminum exhibits excellent corrosion, abrasion resistance, and creation of hard surfaces at O-ring interfaces, electrical insulation for RF powered chambers, and vacuum chamber materials which in combination with polytetrafluoroethylene gaskets.
Vacuum chamber housings are fully integrated semiconductor fabrication equipment housings that provide a controlled vacuum environment for wafer processing. Process chamber housings can include various empty or integrated vacuum plasma etch, deposition, or ion implantation modules that operate at vacuum levels of 10⁻³ to 10⁻⁹ Torr. Various cryo-pump housings can be configured to provide ultra-high vacuum conditions of below 10⁻⁸ Torr. Other modules may include plasma confinement chambers for reactive ion etch and physical vapor deposition, as well as analytical chambers for measuring equipment. Special modules for 200mm, 300mm, and 450mm wafer processing include degas chambers, rapid thermal processing enclosures, pre-clean, and cryo-pump chambers.
Yes, we provide rapid prototyping to verify fit and test assembly, with same-day CAD-to-part capability available for critical projects. For custom automation cells and research platforms, we perform low-volume production of 20 to 500 brackets. For standardized robot models, we perform high-volume production of thousands to tens of thousands of brackets annually, incorporating complete dimensional inspection, flatness verification, and material certifications.
Brace covers ensure sealing surface flatness is within 0.005 inches across flange faces. Thus, ensuring sealing surfaces achieve leak rates below 10⁻⁹ std cc per second helium. O-ring groove dimensions sealing surfaces achieve leak rates below 10⁻⁹ std cc per second helium.
We provide comprehensive finishing solutions tailored to aerospace requirements:
Anodizing (Type II and Type III)
Passivation for corrosion resistance
Precision polishing for aerodynamic surfaces
Custom protective coatings and thermal barriers
Anodizing (Type II and Type III)
Passivation for corrosion resistance
Precision polishing for aerodynamic surfaces
Custom protective coatings and thermal barriers
Got any more questions?
