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Deposition Chamber Housings CNC Machining for Thin Film Equipment

Deposition chamber housings are vacuum containment, precision-engineered structures with ultra-high vacuum isolation, thermal containment, and sterile environments for CVD reactors, PVD systems, and ALD equipment. Zintilon specializes in consulting and CNC machining of process chambers, reaction vessels, and vacuum enclosures for the achievement of exceptional vacuum integrity, thermal uniformity, and long-term reliability in critical thin film deposition applications.
  • Machining for ultra-high vacuum chambers and sealing surfaces
  • Tight tolerances up to ±0.001 in for vacuum integrity
  • Precision milling, welding & surface finishing
  • Support for rapid prototyping and full-scale production
  • ISO 9001-certified manufacturing with thin film equipment expertise
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Trusted by 15,000+ businesses

Why Semi-conductor Companies
Choose Zintilon

prductivity

Increased Productivity

Engineers get time back by not dealing with immature supply chains or lack of supply chain staffing in their company and get parts fast.

10x

10x Tighter Tolerances

Zintilon can machine parts with tolerances as tight as+/ - 0.0001 in -10x greater precision compared to other leading services.

world

World Class Quality

Zintilon provides aerospace parts for leading aerospace enterprises, verified to be compliant with ISO9001 quality standard by a certified registrar. Also, our network includes AS9100 certified manufacturing partners, as needed.

From Prototyping to Mass Production

Zintilon offers CNC machining deposition chamber housings and other components of thin film equipment for semiconductor tool manufacturers, coating system suppliers, and vacuum equipment integrators globally.

Prototype Deposition Chamber Housings

Procure single-piece chambers prototype of your design and chamber assembly, with verification of vacuum, thermal and process containment, before starting the production of your complete thin film equipment.

Key Points:

  • Rapid prototyping with high precision

  • Tight tolerances (±0.001 in)

  • Test design, vacuum integrity, and thermal performance early


3 Axis CNC Machined Stainless Steel Passivation

EVT – Engineering Validation Test

Design thermal, vacuum, and process compliant chambers with the intent of identifying major leak sources early to facilitate smooth transfer to large scale production of thin film equipment.

Key Points:

  • Validate prototype functionality

  • Rapid design iterations

  • Ensure readiness for production


Anodized Aluminum 1024x536

DVT – Design Validation Test

Use a range of materials with different sealing patterns to confirm that chamber housings have design integrity, thermal, and vacuum accuracy prior to starting mass production.

Key Points:

  • Confirm design integrity and vacuum specifications

  • Test multiple materials and configurations

  • Ensure production-ready performance


design aluminium

PVT – Production Validation Test

Before commencing complete production, confirm the capsule chamber housings can be produced in large scale, and define any production limitations to maintain consistent and orderly production.

Key Points:

  • Test large-scale production capability

  • Detect and fix process issues early

  • Ensure consistent part quality


Anodized Titanium Fastener

Mass Production

We manufacture ultra-high vacuum chamber housing assemblies with precision and speed, guaranteeing the reliable deposition of thin films and on-time delivery of semiconductor equipment and coating systems.

Key Points:

  • Consistent, high-volume production

  • Ultra-precision machining for vacuum quality

  • Fast turnaround with strict quality control


production

Simplified Sourcing for
the Semi-conductor Industry

Our aviation industry parts manufacturing capabilities have been verified by many listed companies. We provide a variety of manufacturing processes and surface treatments for aerospace parts including titanium alloys and aluminum alloys.

Explore Other Semiconductor Components

Browse our complete selection of CNC machined semiconductor components, crafted for durability and ultra-tight tolerances. From precision tooling and fixture parts to vacuum chambers and wafer handling systems, we deliver solutions tailored to advanced semiconductor production.

Thin Film Equipment Deposition Chamber Housings Machining Capabilities

We integrate advanced CNC multi-axis machining with tested vacuum systems that detect leaks and mitigate them, while exceptional thin film equipment machining continues to deliver Deposition Chamber Housings CNC Machining. Every chamber component, be it the CVD reactor, PVD system vessel, or ALD process housing and its ultra-high vacuum sealing interface, is designed to achieve optimal vacuum, thermal stability, and system reliability over thousands of deposition cycles. We perform computational numeric control (CNC) milling services to perform advanced chamber geometries and layout configurations, and we conduct precise boring to allow for the installation of viewports and feedthroughs, and to allow for orbital TIG welding to create sealed assemblies. Our services also include adaptive surface technology (AST) for ultra high vacuum (UHV) environments, along with He leak testing to attain sensitivities of 1×10⁻¹⁰ atm·cc/sec (with He), and the performance of thermal cycling experiments to validate the vacuum enclosure. All vacuum chambers housings are constructed from 316L stainless steel for ultra high vacuum (UHV) applications, 6061-T6 Al for low weight construction with hard anodized coatings, Inconel 625 for high temperature items, and specialty Molybdenum and oxygen free copper (OFHC) for high temperatures with thermal management, ensuring high vacuum compatibility with base pressures below 1×10⁻⁹ torr, thermal stabilities of -196 to 1000 C, and with low outgassing rates of below 1×10⁻¹⁰ torr·L/s·cm².
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CNC Machining

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Metal Casting

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Aerospace
Materials & Finishes

Materials
We provide a wide range of materials, including metals, plastics, and composites.
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Finishes
We offer superior surface finishes that enhance part durability and aesthetics for applications requiring smooth or textured surfaces.
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Specialist Industries

you are welcome to emphasize it in the drawings or communicate with the sales.

Aerospace

Source custom aerospace & aviation Parts

Automotive

Automotive custom quality parts

Medical

Custom parts for medical industry

Robotics

Custom CNC Machining Service for Robotics Parts

Automation

Automation custom parts from Zintilon

Consumer Goods

Consumer goods, custom parts by Zintilon

New Energy

Custom parts for new and renewable energy

Semi Conductor

Source custom semi-conductor parts

Materials for Deposition Chamber Housings

The CNC Machine Shop also has a wide range of materials available for use in Deposition Chamber Housings Machining for Thin Film Equipment. Our 12+ vacuum-compatible and high temperature alloy choices allow for easily and quickly for Prototyping to be done while sustaining a high quality production of Thin Film Equipment.

Stainless steel

Stainless steel Image

Stainless steel alloys have high strength, ductility, wear and corrosion resistance. They can be easily welded, machined and polished. The hardness and the cost of stainless steel is higher than that of aluminum alloy.

Price
$ $ $
Lead Time
< 7 days
Tolerances
Down to ±0.005 mm
Max part size
3000*2200*1100 mm
Min part size
2*2*2 mm
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Aluminum

Aluminum Image

High machinability and ductility. Aluminum alloys have good strength-to-weight ratio, high thermal and electrical conductivity, low density and natural corrosion resistance.

Price
$ $ $
Lead Time
< 7 days
Tolerances
Down to ±0.003 mm
Max part size
3000*2200*1100 mm
Min part size
2*2*2 mm
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Titanium

Titanium Image

Titanium is an advanced material with excellent corrosion resistance, biocompatibility, and strength-to-weight characteristics. This unique range of properties makes it an ideal choice for many of the engineering challenges faced by the medical, energy, chemical processing, and aerospace industries.

Price
$$$
Lead Time
< 10 days
Tolerances
Down to ±0.005 mm
Max part size
3000*2200*1100 mm
Min part size
2*2*2 mm
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Steel

Steel Image

Steel is a strong, versatile, and durable alloy of iron and carbon. Steel is strong and durable. High tensile strength, corrosion resistance heat and fire resistance, easily molded and formed. Its applications range from construction materials and structural components to automotive and aerospace components.

Price
$ $ $ $ $
Lead Time
< 10 days
Tolerances
Down to ±0.001 mm (routing)
Max part size
3000*2200*1100 mm
Min part size
2*2*2 mm
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Bronze

Bronze Image

Highly resistant to seawater corrosion. The material’s mechanical properties are inferior to many other machinable metals, making it best for low-stress components produced by CNC machining.

Price
$ $ $ $ $
Lead Time
< 10 days
Tolerances
Down to ±0.005 mm
Max part size
3000*2200*1100 mm
Min part size
2*2*2 mm
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Brass

Brass Image

Brass is mechanically stronger and lower-friction metal properties make CNC machining brass ideal for mechanical applications that also require corrosion resistance such as those encountered in the marine industry.

Price
$$$
Lead Time
< 10 days
Tolerances
Down to ±0.005mm
Max part size
3000*2200*1100 mm
Min part size
2*2*2 mm
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Copper

Copper Image

Few metals have the electric conductivity that copper has when it comes to CNC milling materials. The material’s high corrosion resistance aids in preventing rust, and its thermal conductivity features facilitate CNC machining shaping.

Price
$$$
Lead Time
< 10 days
Tolerances
Down to ±0.005 mm
Max part size
3000*2200*1100 mm
Min part size
2*2*2 mm
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Zinc

Zinc Image

Zinc is a slightly brittle metal at room temperature and has a shiny-greyish appearance when oxidation is removed.

Price
$ $ $ $ $
Lead Time
< 10 days
Tolerances
Down to ±0.005 mm
Max part size
3000*2200*1100 mm
Min part size
2*2*2 mm
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Iron

Iron Image

Iron is an indispensable metal in the industrial sector. Iron is alloyed with a small amount of carbon – steel, which is not easily demagnetized after magnetization and is an excellent hard magnetic material, as well as an important industrial material, and is also used as the main raw material for artificial magnetism.

Price
$ $ $ $ $
Lead Time
< 10 days
Tolerances
Down to ±0.005 mm
Max part size
3000*2200*1100 mm
Min part size
2*2*2 mm
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Magnesium

Magnesium Image

Due to the low mechanical strength of pure magnesium, magnesium alloys are mainly used. Magnesium alloy has low density but high strength and good rigidity. Good toughness and strong shock absorption. Low heat capacity, fast solidification speed, and good die-casting performance.

Price
$ $ $ $
Lead Time
< 7 days
Tolerances
Down to ±0.005 mm
Max part size
3000*2200*1100 mm
Min part size
2*2*2 mm
View More Details
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FAQs: Deposition Chamber Housings for Thin Film Equipment Applications

These are ultra-high vacuum chambers for CVD, PVD, and ALD systems. They comprise process chambers, reaction vessels, and vacuum enclosures, which reach base pressures of 1×10⁻⁹ torr, have operational temperature ranges of -196 °C to +1000 °C, and have leak rates of 1×10⁻¹⁰ atm·cc/sec.

Stainless steel 316L offers perfect vacuum compatibility, little outgassing, and resistance to corrosion. Inconel 625 possesses oxidation resistance and strength at elevated temperatures of up to 1000 °C. Aluminum 6061-T6 has good thermal conductivity which is ideal for temperature-controlled applications, and is lightweight.

We ensure leak-tight performance and vacuum integrity, and so achieve ±0.025 mm for the overall dimensional accuracy, for the flange flatness for vacuum sealing is 0.012 mm, of ±0.015 mm for the port positioning accuracy, and finishing the surface to below 0.8 Ra microns.

We have performed helium leak testing, and thus have vacuum materials per SEMI F57, outgassing per ASTM E595, pressure vessels per ASME Section VIII, and overall have met ISO 9001 for quality.

For standard chambers, lead time is 18 to 25 days, which consists of machining, welding, and leak testing. Custom assemblies with complex designs take 7 to 10 weeks. Prototype chambers take 14 to 20 days.

We provide comprehensive finishing solutions tailored to aerospace requirements:
Anodizing (Type II and Type III)
Passivation for corrosion resistance
Precision polishing for aerodynamic surfaces
Custom protective coatings and thermal barriers

Certainly. We construct chambers specially designed for specific deposition techniques. CVD reactors with heated walls up to 600°C and precursor injection manifolds, PVD systems with target mounting mechanisms and substrate rotation, ALD reactors with rapid gas switches and ±1°C temperature uniformity, high-temperature furnaces with thermal insulation that operate up to 1000°C, integrated load lock systems, and other customized polymerization systems that have in-situ multi-sample processing, remote monitoring ports, and automated handling systems.

Flange flatness of ±0.012mm guarantees an airtight seal, achieving base pressures of 1 × 10⁻⁹ torr, even critical to high-quality thin film deposition. Port placements of ±0.015mm lead to proper alignment of the feedthrough, reducing the risk of vacuum leaks and contamination. Electropolishing to a smooth finish reduces particle generation, outgassing, and improves process cleanliness. Careful selection of vacuum-compatible alloys with the thermal cycling regime guarantees material selection reliability. Quality manufacturing leads to reliable thin film deposition, supporting uniform film deposition in the semiconductor industry with ±2% uniformity, accurate optical coatings within ±1% color transmission, and ultra-clean research applications achieving < 1 × 10¹⁰ atoms/cm² contamination for up to 10-15 years of chamber operation.
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