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Chemical Delivery Blocks CNC Machining for Semiconductor Processes

Fluid distribution components which are precision machined for chemical delivery blocks are used in semiconductor fabrication equipment to allow for high routing of ultra high purity chemicals, solvents and process gasses, contamination-free. Zintilom sells CNC chemical manifold machining of blocks, fluid distribution assembly, and process gas delivery systems for optimizing flow control and chemical compatibility as well as durability for major semiconductor wet processing and chemical distribution applications.
  • Machining for precise flow channel geometries and chemical routing
  • Tight tolerances up to ±0.0003 in for leak-free connections
  • Precision drilling, milling & chemical-resistant surface finishing
  • Support for rapid prototyping and full-scale production
  • ISO 9001-certified manufacturing with semiconductor processes expertise
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Trusted by 15,000+ businesses

Why Semi-conductor Companies
Choose Zintilon

prductivity

Increased Productivity

Engineers get time back by not dealing with immature supply chains or lack of supply chain staffing in their company and get parts fast.

10x

10x Tighter Tolerances

Zintilon can machine parts with tolerances as tight as+/ - 0.0001 in -10x greater precision compared to other leading services.

world

World Class Quality

Zintilon provides aerospace parts for leading aerospace enterprises, verified to be compliant with ISO9001 quality standard by a certified registrar. Also, our network includes AS9100 certified manufacturing partners, as needed.

From Prototyping to Mass Production

Zintilon supplies designed and engineered components, under 9001 Standard Certification, to semiconductor equipment manufacturers, chemical delivery system suppliers, and wet processing tool integrators around the world.

Prototype Chemical Delivery Blocks

Receive meticulously crafted prototypes of chemical delivery block assemblies based on your final design. Prior to the large-scale manufacturing of semiconductor processing equipment, test and verify the flow distribution, chemical compatibility, interface connections, and leaks.

Key Points:

  • Rapid prototyping with high precision

  • Tight tolerances (±0.0003 in)

  • Test flow paths, chemical resistance, and sealing performance early


3 Axis CNC Machined Stainless Steel Passivation

EVT – Engineering Validation Test

All flow control, chemical compatibility, and contamination prevention needs to be understood in order to proceed with prototype construction of chemical delivery block design. Identify pressure drop and leakage issues early to ensure smooth distribution of the chemical, as prototyped blocks will be adjusted to meet flow uniformity and connection needs.

Key Points:

  • Validate prototype functionality

  • Rapid design iterations

  • Ensure readiness for production


Anodized Aluminum 1024x536

DVT – Design Validation Test

Explore a variety of materials and flow channel arrangements to evaluate performance of your chemical delivery block with regards to flow accuracy and chemical resistance. Such analysis will define the performance of the entire semiconductor process system in terms of the targeted chemical purity and delivery accuracy.

Key Points:

  • Confirm design integrity and flow specifications

  • Test multiple materials and configurations

  • Ensure production-ready performance


design aluminium

PVT – Production Validation Test

Evaluate the challenges of achieving uniformity and efficient flow of the manufacturing process to determine the production capacity for the chemical delivery blocks to be synthesized on a large scale before commencing full production for the uniform production of the blocks to resolve the efficiency gaps in the process.

Key Points:

  • Test large-scale production capability

  • Detect and fix process issues early

  • Ensure consistent part quality


Anodized Titanium Fastener

Mass Production

Manufacture delivery blocks in bulk in a timely manner to meet the needs of semiconductor processes and to provide them to the manufacturers of the equipment and the distributors of the chemical delivery systems.

Key Points:

  • Consistent, high-volume production

  • Precision machining for semiconductor quality

  • Fast turnaround with strict quality control


production

Simplified Sourcing for
the Semi-conductor Industry

Our aviation industry parts manufacturing capabilities have been verified by many listed companies. We provide a variety of manufacturing processes and surface treatments for aerospace parts including titanium alloys and aluminum alloys.

Explore Other Semiconductor Components

Browse our complete selection of CNC machined semiconductor components, crafted for durability and ultra-tight tolerances. From precision tooling and fixture parts to vacuum chambers and wafer handling systems, we deliver solutions tailored to advanced semiconductor production.

Semiconductor Processes, Chemical Delivery Blocks, Machining Capabilities

With the flow testing technology and CNC multi machines, we offer Chemical Delivery blocks of precise machining for Semiconductors with quality assurance in each of the blocks which are to be dispensed in millions of cycles and in every piece inclusive of the single channel manifold, the multi-port distribution valve, and the integrated valve control assemblies with flow control design with dependable performance to guarantee chemical purity and low dead volume. We engage in semiconductors ultra-high purification chemical machining, which includes: fluid chamber ultra-precision routered waters with a diameter uniformity of ±0.025 mm; micro-milling of intricate bustling waters with wall thickness of ±0.050 mm; chemical resistant NPT, BSPT, and metric thread milling connections with ±0.015 mm thread pitch accuracy; and expert specialized surface finishing to ensure ultra-high purity and operation particle-free. We also conduct chemical compatibility validations and pressure tests. Each chemical delivery block is manufactured in either PEEK (Polyetheretherketone) which is mechanically robust and broadly chemically compatible; PTFE (Polytetrafluoroethylene) is aggressive solvent resistant; PFA (Perfluoroalkoxy) has full chemical inertness with optical clarity; and other specialized materials to withstand strong acids and bases like PVDF (Polyvinylidene Fluoride) and ultra-pure grade stainless steel 316L with electropolish, or Hastelloy C-276 that can handle hydrofluoric acid with other mixed acid solutions. We guarantee weight change during laboratory chemical immersion and exposure of tests gets sealed < 1.0% in 30 days. And unlike other companies, we promise no He leak rates across the tests, operational pressures between 5 and 150 psi, and operational conditions of temperature between ambient conditions and 150°C. No tests with metallic impurities of more than 1 ppb, necessary for ultra-high purity seed and smoke for semiconductors.
milling

CNC Machining

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sheet metal

Sheet Metal Fabrication

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edm

Wire EDM

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casting

Metal Casting

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Aerospace
Materials & Finishes

Materials
We provide a wide range of materials, including metals, plastics, and composites.
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Finishes
We offer superior surface finishes that enhance part durability and aesthetics for applications requiring smooth or textured surfaces.
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Specialist Industries

you are welcome to emphasize it in the drawings or communicate with the sales.

Aerospace

Source custom aerospace & aviation Parts

Automotive

Automotive custom quality parts

Medical

Custom parts for medical industry

Robotics

Custom CNC Machining Service for Robotics Parts

Automation

Automation custom parts from Zintilon

Consumer Goods

Consumer goods, custom parts by Zintilon

New Energy

Custom parts for new and renewable energy

Semi Conductor

Source custom semi-conductor parts

Materials for Chemical Delivery Blocks

Our CNC machine shop utilizing chemical delivery blocks 12+ ultra-pure polymers, fluoropolymer materials, as well as chemically resistant alloys for rapid prototyping, precision semiconductor processes, and for the continual manufacturing and sustaining of quality per the SEMI F57 and cleanroom standards. Chemically resistant polymers and alloys are vital for the processes of rapid prototyping and precision semiconductor. Over a dozen polymers and alloys will serve these functions as well as the other requirements at a decent level.

Stainless steel

Stainless steel Image

Stainless steel alloys have high strength, ductility, wear and corrosion resistance. They can be easily welded, machined and polished. The hardness and the cost of stainless steel is higher than that of aluminum alloy.

Price
$ $ $
Lead Time
< 7 days
Tolerances
Down to ±0.005 mm
Max part size
3000*2200*1100 mm
Min part size
2*2*2 mm
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Aluminum

Aluminum Image

High machinability and ductility. Aluminum alloys have good strength-to-weight ratio, high thermal and electrical conductivity, low density and natural corrosion resistance.

Price
$ $ $
Lead Time
< 7 days
Tolerances
Down to ±0.003 mm
Max part size
3000*2200*1100 mm
Min part size
2*2*2 mm
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Titanium

Titanium Image

Titanium is an advanced material with excellent corrosion resistance, biocompatibility, and strength-to-weight characteristics. This unique range of properties makes it an ideal choice for many of the engineering challenges faced by the medical, energy, chemical processing, and aerospace industries.

Price
$$$
Lead Time
< 10 days
Tolerances
Down to ±0.005 mm
Max part size
3000*2200*1100 mm
Min part size
2*2*2 mm
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Steel

Steel Image

Steel is a strong, versatile, and durable alloy of iron and carbon. Steel is strong and durable. High tensile strength, corrosion resistance heat and fire resistance, easily molded and formed. Its applications range from construction materials and structural components to automotive and aerospace components.

Price
$ $ $ $ $
Lead Time
< 10 days
Tolerances
Down to ±0.001 mm (routing)
Max part size
3000*2200*1100 mm
Min part size
2*2*2 mm
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Bronze

Bronze Image

Highly resistant to seawater corrosion. The material’s mechanical properties are inferior to many other machinable metals, making it best for low-stress components produced by CNC machining.

Price
$ $ $ $ $
Lead Time
< 10 days
Tolerances
Down to ±0.005 mm
Max part size
3000*2200*1100 mm
Min part size
2*2*2 mm
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Brass

Brass Image

Brass is mechanically stronger and lower-friction metal properties make CNC machining brass ideal for mechanical applications that also require corrosion resistance such as those encountered in the marine industry.

Price
$$$
Lead Time
< 10 days
Tolerances
Down to ±0.005mm
Max part size
3000*2200*1100 mm
Min part size
2*2*2 mm
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Copper

Copper Image

Few metals have the electric conductivity that copper has when it comes to CNC milling materials. The material’s high corrosion resistance aids in preventing rust, and its thermal conductivity features facilitate CNC machining shaping.

Price
$$$
Lead Time
< 10 days
Tolerances
Down to ±0.005 mm
Max part size
3000*2200*1100 mm
Min part size
2*2*2 mm
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Zinc

Zinc Image

Zinc is a slightly brittle metal at room temperature and has a shiny-greyish appearance when oxidation is removed.

Price
$ $ $ $ $
Lead Time
< 10 days
Tolerances
Down to ±0.005 mm
Max part size
3000*2200*1100 mm
Min part size
2*2*2 mm
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Iron

Iron Image

Iron is an indispensable metal in the industrial sector. Iron is alloyed with a small amount of carbon – steel, which is not easily demagnetized after magnetization and is an excellent hard magnetic material, as well as an important industrial material, and is also used as the main raw material for artificial magnetism.

Price
$ $ $ $ $
Lead Time
< 10 days
Tolerances
Down to ±0.005 mm
Max part size
3000*2200*1100 mm
Min part size
2*2*2 mm
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Magnesium

Magnesium Image

Due to the low mechanical strength of pure magnesium, magnesium alloys are mainly used. Magnesium alloy has low density but high strength and good rigidity. Good toughness and strong shock absorption. Low heat capacity, fast solidification speed, and good die-casting performance.

Price
$ $ $ $
Lead Time
< 7 days
Tolerances
Down to ±0.005 mm
Max part size
3000*2200*1100 mm
Min part size
2*2*2 mm
View More Details
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FAQs: Plasma Etching Chamber Parts for Semiconductor Tools Applications

Chamber parts of plasma etching should contain precision and custom machining of the chamber liner components with dimensional tolerances of ±0.050 mm, electrodes of the chamber having flatness of ±0.025 mm to induce uniform plasma, gas distribution shower heads of 50 to 500 holes to guarantee ±3 percent uniformity of flow and plasma, RF coupling rings for matching value of impedance and micro to nano in range of ±5 percent, and various process kit components (focus rings, edge rings) with matching of thermal expansion to silicon wafers. There are some of these components in the kit that require vacuum sealing of the set, with leak rates below 1×10⁻⁹ torr·L/s, thermal erosion stability with degradation rates on the range of 1 µm of erosion in 1000 working hours, stability with regional thermal cycling of 25°C to 400°C, and generation of particles below 0.01 greater than 0.1 micron particles in series per cm² for exhausting cycles of plasma processing greater than 10,000 cycles will be required, and these parts will also require sit.

Anodized aluminum 6061-T6 has a low density of 2.7 g/cm³, is easy to work with and can achieve a surface finish of 1.6 Ra microns and lower, has a 25 to 50 µm thick anodized plasma resistant coating, and has a thermal conductivity of 167 W/m·K which allows for sufficient heat dissipation. 316L stainless steel has the best vacuum compatibility of the materials with an outgassing rate of less than 1×10⁻⁸ torr·L/s·cm², is cleanroom compatible, has corrosion resistant plasma chemistries, and has a thermal expansion of 16 µm/m·°C. Ceramics, specifically Al2O3 and Y2O3, have the best resistance to plasma erosion with wear rates on the order of 10 to 50 times less than that of metals, can withstand temperatures up to 1500°C, have good dielectric strength which allows for RF isolation, and are inert to fluorine and chlorine containing plasma chemistries.

Through 5 axis CNC milling, gas chambers with complex geometrical shapes are achieved with a tolerance of ± 0.025 mm. Also, gas distribution holes are drilled precisely with a diameter deviation of ± 0.025 mm and a positional deviation of ± 0.050 mm. High speed rotary cnc machining provides with chamber parts with a diameter of 1.6 Ra microns. Vacuum sealing threads with 2B class tolerance are produced by thread milling. Wire EDM processes are able to cut in a tolerance of ± 0.01 mm to make intricate designs in cooling channels of electrodes and is the finish technology. EDM is best to make pieces with a diameter of 300 mm. Depth of O-ring grooves is achieved with a deviation of ± 0.050 mm and the surface finish also is 0.8 Ra microns which is best for good sealing of chambers.

The tolerances we maintain for chambers are: flatness at ±0.025 mm for even plasma gaps, gas hole diameters at ±0.025 mm for flow uniformity within ±3% for O-ring grooves with depth tolerances of ±0.050 mm, for leak rates >1×10⁻⁹ torr·L/s, electrode parallelism at ±0.050 mm for reliable RF coupling, mounting hole position at ±0.075 mm, a surface finish of 0.8 to 3.2 Ra microns for plasma resistance, and overall ±0.100 mm. These tolerances support plasma uniformity with etch rates that have a deviation of less than ±5% for the entire wafer, vacuum integrity with base pressures of less than 1×10⁻⁷ torr, thermal cycling stability from room to 400°C, and a life expectancy of 10,000 RF hours.

Yes, we provide rapid prototyping to verify fit and test assembly, with same-day CAD-to-part capability available for critical projects. For custom automation cells and research platforms, we perform low-volume production of 20 to 500 brackets. For standardized robot models, we perform high-volume production of thousands to tens of thousands of brackets annually, incorporating complete dimensional inspection, flatness verification, and material certifications.
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